NASA 1996 SBIR Phase I

PROJECT TITLE : Novel Sensors for Thin Film Deposition Control

TECHNICAL ABSTRACT (LIMIT 200 WORDS)

Rugate Technologies, Incorporated (RTI) proposes to develop a set of light pipe and fiber optic sensors and advanced data reduction algorithms for distributed insitu measurements of critical thin film and vacuum deposition process parameters. This suite of sensors will provide accurate, real time measurement of optical thickness, deposition rate, film stress, and refractive index at multiple points in a vacuum coating chamber. Data processed from these sensors, using multi-resolution techniques and wavelet noise reduction will produce a status vector describing the material layers being deposited. By fusing measurements from different locations within the chamber, as well as different parameters, we will be able to describe and control the process in terms of the design parameters which directly impact product performance. The availability of accurate, real-time optical data will improve process control and product yield for optical interference filters and thin film electronic layers. These sensors will enable redesign of the remaining material layers to compensate for process errors. The primary goals of the Phase I effort are to breadboard prototype sensors and generate the data analysis, noise reduction, and sensor fusion algorithms. We will demonstrate these algorithms on breadboard sensor prototypes. Phase II will address insitu testing, source configuration, software refinement, and vacuum chamber compatibility.

This research will improve the yield and manufacturability of high performance prototype optical filters. By working with Kurt Lesker, a manufacturer of vacuum systems to the electronic and optical industry, we will be able to commercialize the successes of this research quickly. We further believe that much of this technology will be of equal interest to the electronic and non-linear materials communities.

Thomas D. Rahmlow, Jr.
Rugate Technologies, Incorporated
One Pomperaug Office Park, Suite 307
Southbury, Ct. 06488

Rugate Technologies, Incorporated
One Pomperaug Office Park, Suite 307
Southbury, Ct. 06488